Si nanostructures fabricated by anodic oxidation with an atomic force microscope and etching with an electron cyclotron resonance source

Si/SiGe Nanostructures Fabricated by Atomic Force Microscopy Oxidation

In this work, local AFM oxidation technique in a controlled humidity environment has been used to create small features in strained SiGe alloys. When directly oxidizing SiGe alloys, minimum line widths of 20nm were achieved by adjusting parameters such as the bias voltage on the microscope tip and the tip writing speed. It was found that when bias voltage increases, and/or when the tip writing ...

Electron Cyclotron Resonance Ion Source

Electron Cyclotron Resonance Ion Source

Electron Cyclotron Resonance Ion Source

Reversible mechano-electrochemical writing of metallic nanostructures with the tip of an atomic force microscope

We recently introduced a method that allows the controlled deposition of nanoscale metallic patterns at defined locations using the tip of an atomic force microscope (AFM) as a "mechano-electrochemical pen", locally activating a passivated substrate surface for site-selective electrochemical deposition. Here, we demonstrate the reversibility of this process and study the long-term stability of ...